Asymetrically strained high performance Germanium gate-all-around nanowire p-FETs featuring 3.5 nm wire width and contractible phase change liner stressor (Ge2Sb2Te5)
10.1109/IEDM.2013.6724699
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Main Authors: | Cheng, R., Liu, B., Guo, P., Yang, Y., Zhou, Q., Gong, X., Dong, Y., Tong, Y., Bourdelle, K., Daval, N., Delprat, D., Nguyen, B.-Y., Augendre, E., Yeo, Y.-C. |
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其他作者: | ELECTRICAL & COMPUTER ENGINEERING |
格式: | Conference or Workshop Item |
出版: |
2014
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在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/83499 |
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