Design and fabrication of an improved filtered cathodic vacuum ARC (FCVA) deposition system for tetrahedral amorphous carbon (TA-C) films

• Main Author: Tay, Beng Kang
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/2743
• Institution: Nanyang Technological University

Various methods and apparatus have been developed for obtaining thin films or thin coatings. Films can be deposited by physical vapour deposition techniques and chemical vapour deposition techniques. Cathodic Vacuum Arc relates to the physical techniques, and which involves the use of positive ions...