Synthesis and characterization of metal silicides nanostructures

Synthesis and characterization of metal silicides nanostructures

Metal silicides have been used extensively in microelectronics devices, such as contacts and local interconnects. With increasing research and development of a bottomup fabrication approach for semiconducting and metallic nanostructures, metal silicides nanostructures can continue to play an importa...

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書目詳細資料
主要作者:	Li, Shaozhou.
其他作者:	School of Materials Science & Engineering
格式:	Theses and Dissertations
語言:	English
出版:	2013
主題:	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects
在線閱讀:	http://hdl.handle.net/10356/51007
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	Nanyang Technological University
語言:	English

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