Atomistic simulation study of high-κ oxide defects for understanding gate stack and RRAM reliability

High-κ Oxide Defects in the MOSFET gate stack and RRAM cell severely impact the device reliability. In this work, we conducted first-principles modeling and simulation to investigate BTI performance in the SiON, HfO2 and La doped HfO2 MOSFET gate stacks. The properties of VO, Oi and VO-Oi defect pai...

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主要作者: Gu, Chenjie
其他作者: Ang Diing Shenp
格式: Theses and Dissertations
語言:English
出版: 2015
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在線閱讀:https://hdl.handle.net/10356/62224
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