Gate-first germanium nMOSFET with CVD HfO2 gate dielectric and silicon surface passivation
10.1109/LED.2006.874209
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Main Authors: | Wu, N., Zhang, Q., Chan, D.S.H., Balasubramanian, N., Zhu, C. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82400 |
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Institution: | National University of Singapore |
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